What is SUPERFLAT Si?

SUPERFLAT Si is a high-precision amorphous silicon layer that has been developed as a polishable coating for precision mirrors. It is characterized by an extremely low roughness (<1 nm) and enables precise shape correction and improved optical performance.

Thanks to its wide range of applications, SUPERFLAT Si is suitable for

• Mirror coatings in the aerospace industry
• Industrial class laser systems
• Optics in telescopes
• The semiconductor industry

The coating can be applied to various metals, ceramics and alloys without affecting the properties of the substrate material.

Challenges in high-precision optics

Without a high-quality amorphous silicon layer, the following challenges can occur:

• High surface roughness — Uneven structures impair optical performance and require complex post-processing.

• Long polishing times — Conventional materials are difficult to process and increase manufacturing costs.

• Restricted material compatibility — Not all surfaces are suitable for conventional polishing or layer optimization.

• Impaired reflection efficiency — Uneven layers reduce optical performance across various spectral ranges.

• Higher production costs — Time and resource-intensive processes increase manufacturing costs and limit scalability.

SUPERFLAT Si solves these challenges and enables the highest precision with minimal processing time.

Your advantages with amorphous silicon layers from Miba

• Low roughness and high reflection values – Roughness values below 1 nm for the highest attainable optical perfection on the polishable coating for high-precision optics.

• Shorter processing times until the final surface roughness is achieved – Less pre-processing required, excellent polishability of the coating.

• Free choice of mirror material – Superflat Si is finished on the layer, not on the mirror material.

• Simple shape correction processes within the layer – Precise adjustment for spherical, aspherical and free-form optics.

• Wide wavelength range – Suitable for applications ranging from EUV to IR

• Homogeneous material properties – Consistent machinability from the first nanometers.

Why Miba?

Miba offers high-precision coating solutions developed for maximum efficiency, durability and quality.

• Advanced manufacturing technologies – Automated and optimized processes for maximum precision.

• Flexible production capacities – Custom-tailored solutions for one-off manufacturing as well as for series production.

• Full service support – From development to series production, including packaging and logistics